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In Time-of-Flight Secondary Ion Mass
Spectrometry (ToF-SIMS) analysis, a sample
surface is bombarded with a high energy pulsed
primary ion beam. The primary ion energy is transferred
to target atoms via atomic collisions and a so-called
collision cascade is generated. Part of this
energy is carried back to the surface and
subsequently atomic and molecular ions are
emitted from the outer layers. These ions are
extracted into the mass spectrometer and their
mass is determined by measuring the flight time
to the detector. Thus the chemical composition
of a surface can be probed with high
sensitivity. In scanning and sample erosion
mode, it is also possible to determine the
lateral and vertical distribution of species in
a sample. By combining imaging and depth
profiling even the 3D chemical composition of a
sample can be visualized.
Suitable Samples
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solid surfaces
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liquids (prepared onto solid substrates)
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powders
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fibers
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particles
Information
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chemical composition at the surface, laterally (imaging) and vertically resolved (depth profiling)
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detection of all elements (including H)
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detection of molecules (intact up to several 1000 u)
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information depth: uppermost monolayer
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semi-quantitative data
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secondary electron images without sample coating
Performance in Routine Analysis
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lateral resolution ≥ 300 nm
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depth resolution ≥ 1 nm
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sensitivity: ppm/fmol
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maximum field of view: 9 x 9 cm2, maximum depth: 5 µm
State-of-the-Art Instrumentation
tascon usa always uses state-of-the-art instrumentation.
Currently, we operate IONTOF's TOF.SIMS 5-300
Features Include
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Bi cluster ion gun for optimum ion yields on
organics
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low energy O2 (Ar, Xe, ...) and Cs guns for
high performance depth profiling
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direct optical sample observation
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easy charge compensation on insulators
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batch operation for large sample throughput
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accommodation of large samples: 300 mm
(diameter); 2 cm (height)
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