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In Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis, a sample surface is bombarded with a high energy pulsed primary ion beam. The primary ion energy is transferred to target atoms via atomic collisions and a so-called collision cascade is generated. Part of this energy is carried back to the surface and subsequently atomic and molecular ions are emitted from the outer layers. These ions are extracted into the mass spectrometer and their mass is determined by measuring the flight time to the detector. Thus the chemical composition of a surface can be probed with high sensitivity. In scanning and sample erosion mode, it is also possible to determine the lateral and vertical distribution of species in a sample. By combining imaging and depth profiling even the 3D chemical composition of a sample can be visualized.

Suitable Samples


  • solid surfaces
  • liquids (prepared onto solid substrates)
  • powders
  • fibers
  • particles

Information


  • chemical composition at the surface, laterally (imaging) and vertically resolved (depth profiling)
  • detection of all elements (including H)
  • detection of molecules (intact up to several 1000 u)
  • information depth: uppermost monolayer
  • semi-quantitative data
  • secondary electron images without sample coating

Performance in Routine Analysis


  • lateral resolution ≥ 300 nm
  • depth resolution ≥ 1 nm
  • sensitivity: ppm/fmol
  • maximum field of view: 9 x 9 cm2, maximum depth: 5 µm

State-of-the-Art Instrumentation


tascon usa always uses state-of-the-art instrumentation.
Currently, we operate IONTOF's TOF.SIMS 5-300

Features Include

  • Bi cluster ion gun for optimum ion yields on organics
  • low energy O2 (Ar, Xe, ...) and Cs guns for high performance depth profiling
  • direct optical sample observation
  • easy charge compensation on insulators
  • batch operation for large sample throughput
  • accommodation of large samples: 300 mm (diameter); 2 cm (height)

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